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Khoram, Mansour, Ghomi, Hamid. (1394). Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation. , 10(1), 41-46. doi: 10.1007/s40094-015-0199-z
Mansour Khoram; Hamid Ghomi. "Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation". , 10, 1, 1394, 41-46. doi: 10.1007/s40094-015-0199-z
Khoram, Mansour, Ghomi, Hamid. (1394). 'Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation', , 10(1), pp. 41-46. doi: 10.1007/s40094-015-0199-z
Khoram, Mansour, Ghomi, Hamid. Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation. , 1394; 10(1): 41-46. doi: 10.1007/s40094-015-0199-z

Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation

Journal of Theoretical and Applied Physics
مقاله 7، دوره 10، شماره 1، خرداد 2016، صفحه 41-46  XML اصل مقاله (749.57 K)
شناسه دیجیتال (DOI): 10.1007/s40094-015-0199-z
نویسندگان
Mansour Khoram email 1؛ Hamid Ghomi2
1Department of Physics, Borujerd Branch, Islamic Azad University
2Laser and Plasma Research Institute, Shahid Beheshti University
چکیده
AbstractA cold magnetized plasma sheath is considered to examine the gas pressure effect on the sheath dynamics. A fluid model is used to describe the plasma sheath dynamic. The governing fluid equations in the plasma are solved from plasma center to the target using the finite difference method and some convenient initial and boundary conditions at the plasma center and target. It is found that, the ion-neutral collision has significant effect on the dynamic characteristics of the high-voltage sheath in the plasma immersion ion implantation (PIII). It means that, the temporal profile of the ion dose on the target and sheath width are decreased by increasing the gas pressure. Also, the gas pressure substantially diminishes the temporal psychograph of ion incident angle on the target.
کلیدواژه‌ها
Dynamic sheath؛ Gas pressure؛ PIII؛ Magnetized sheath
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