دانشگاه آزاد اسلامی واحد علوم و تحقیقات

 آمار

تعداد نشریات50
تعداد شماره‌ها2,232
تعداد مقالات20,475
تعداد مشاهده مقاله25,238,707
تعداد دریافت فایل اصل مقاله22,874,747
Ghorannevis, Z., Akbarnejad, E., Ghoranneviss, M.. (1394). Structural and morphological properties of ITO thin films grown by magnetron sputtering. , 9(4), 285-290. doi: 10.1007/s40094-015-0187-3
Z. Ghorannevis; E. Akbarnejad; M. Ghoranneviss. "Structural and morphological properties of ITO thin films grown by magnetron sputtering". , 9, 4, 1394, 285-290. doi: 10.1007/s40094-015-0187-3
Ghorannevis, Z., Akbarnejad, E., Ghoranneviss, M.. (1394). 'Structural and morphological properties of ITO thin films grown by magnetron sputtering', , 9(4), pp. 285-290. doi: 10.1007/s40094-015-0187-3
Ghorannevis, Z., Akbarnejad, E., Ghoranneviss, M.. Structural and morphological properties of ITO thin films grown by magnetron sputtering. , 1394; 9(4): 285-290. doi: 10.1007/s40094-015-0187-3

Structural and morphological properties of ITO thin films grown by magnetron sputtering

Journal of Theoretical and Applied Physics
مقاله 5، دوره 9، شماره 4، اسفند 2015، صفحه 285-290  XML اصل مقاله (1.17 M)
شناسه دیجیتال (DOI): 10.1007/s40094-015-0187-3
نویسندگان
Z. Ghorannevis email 1؛ E. Akbarnejad2؛ M. Ghoranneviss2
1Department of Physics, Karaj Branch, Islamic Azad University
2Plasma Physics Research Centre, Science and Research Branch, Islamic Azad University
چکیده
AbstractPhysical properties of transparent and conducting indium tin oxide (ITO) thin films grown by radiofrequency (RF) magnetron sputtering are studied systematically by changing deposition time. The X-ray diffraction (XRD) data indicate polycrystalline thin films with grain orientations predominantly along the (2 2 2) and (4 0 0) directions. From atomic force microscopy (AFM) it is found that by increasing the deposition time, the roughness of the film increases. Scanning electron microscopy (SEM) images show a network of a high-porosity interconnected nanoparticles, which approximately have a pore size ranging between 20 and 30 nm. Optical measurements suggest an average transmission of 80 % for the ITO films. Sheet resistances are investigated using four-point probes, which imply that by increasing the film thickness the resistivities of the films decrease to 2.43 × 10−5 Ω cm.
کلیدواژه‌ها
Indium tin oxide؛ Magnetron sputtering؛ Thickness
آمار
تعداد مشاهده مقاله: 51
تعداد دریافت فایل اصل مقاله: 56


سامانه مدیریت نشریات علمی. قدرت گرفته از سیناوب